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Cvd Of Compound Semiconductors: Precursor Synthesis, Development And Applications

Cvd Of Compound Semiconductors: Precursor Synthesis, Development And Applications

Anthony C. Jones
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Chemical growth methods of electronic materials are the keystone of microelectronic device processing. This book discusses the applications of metalorganic chemistry for the vapor phase deposition of compound semiconductors. Vapor phase methods used for semiconductor deposition and the materials properties that make the organometallic precursors useful in the electronics industry are discussed for a variety of materials.
Topics included:
* techniques for compound semiconductor growth
* metalorganic precursors for III-V MOVPE
* metalorganic precursors for II-VI MOVPE
* single-source precursors
* chemical beam epitaxy
* atomic layer epitaxy
Several useful appendixes and a critically selected, up-to-date list of references round off this practical handbook for materials scientists, solid-state and organometallic chemists, and engineers.
Language
English
Pages
360
Format
Hardcover
Publisher
Wiley-Vch
Release
November 14, 1996
ISBN
3527292942
ISBN 13
9783527292943

Cvd Of Compound Semiconductors: Precursor Synthesis, Development And Applications

Anthony C. Jones
0/5 ( ratings)
Read Download
Chemical growth methods of electronic materials are the keystone of microelectronic device processing. This book discusses the applications of metalorganic chemistry for the vapor phase deposition of compound semiconductors. Vapor phase methods used for semiconductor deposition and the materials properties that make the organometallic precursors useful in the electronics industry are discussed for a variety of materials.
Topics included:
* techniques for compound semiconductor growth
* metalorganic precursors for III-V MOVPE
* metalorganic precursors for II-VI MOVPE
* single-source precursors
* chemical beam epitaxy
* atomic layer epitaxy
Several useful appendixes and a critically selected, up-to-date list of references round off this practical handbook for materials scientists, solid-state and organometallic chemists, and engineers.
Language
English
Pages
360
Format
Hardcover
Publisher
Wiley-Vch
Release
November 14, 1996
ISBN
3527292942
ISBN 13
9783527292943

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