Read Anywhere and on Any Device!

Subscribe to Read | $0.00

Join today and start reading your favorite books for Free!

Create Free Account

Quick and Easy Sign Up!

It takes less then 1 minute to sign up, then you can enjoy Unlimited eBooks.

Sign Up Browse

Popular Genres

Read Anywhere and on Any Device!

  • Download on iOS
  • Download on Android
  • Download on iOS

Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications

Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications

Tommi Kääriäinen
0/5 ( ratings)
Read Download
Since the first edition was published in 2008, Atomic Layer Deposition has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD comprehensively from a practical perspective. It covers ALD's application to microelectronics and nanotechnology; many important new and emerging applications; thermal processes for ALD growth of nanometer thick films of semiconductors, oxides, metals and nitrides; and the formation of organic and hybrid materials.
Language
English
Pages
272
Format
Kindle Edition
Publisher
Wiley-Scrivener
Release
May 17, 2013

Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications

Tommi Kääriäinen
0/5 ( ratings)
Read Download
Since the first edition was published in 2008, Atomic Layer Deposition has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD comprehensively from a practical perspective. It covers ALD's application to microelectronics and nanotechnology; many important new and emerging applications; thermal processes for ALD growth of nanometer thick films of semiconductors, oxides, metals and nitrides; and the formation of organic and hybrid materials.
Language
English
Pages
272
Format
Kindle Edition
Publisher
Wiley-Scrivener
Release
May 17, 2013

More books from Tommi Kääriäinen

Rate this book!

Write a review?

loader